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Re-evaporation effects and optical properties of molecular-beam-epitaxial AlGaAs/GaAs/AlGaAs wells

28

Citations

4

References

1993

Year

Abstract

Elemental materials that condense on surfaces near effusion cells can be reevaporated toward substrates when heated by radiation from effusion furnaces. There they accumulate as unwanted impurities at interfaces and distribute throughout epitaxial films during growth. This effect is greatly increased when shutters are closed. Re-evaporated aluminum is shown to degrade minority-carrier properties of Al0.3Ga0.7As/GaAs double heterostructures. Modified temperature schedules and hardware to reduce re-evaporation effects are suggested.

References

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