Journal of Nuclear Materials · 2005 · 18 citations · 4 references
Natural SciencesElectrical EngineeringPhysicsPlasma PhysicsTransport PhenomenaChemical Vapor DepositionGas InjectionHigh-temperature PlasmasHydrocarbon MigrationPlasma SourcesPlasma TransportAtmospheric-pressure PlasmasLow-pressure PlasmasPlasma DepositionPlasma GenerationResidual Hydrocarbons
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