Concepedia

Publication | Closed Access

A silicon integrated opto-electro-mechanical displacement sensor

DOI

27

Citations

8

References

2004

Year

Sabine Fourment, Philippe Arguel, J.-L. Noullet, F. Lozes, S. Bonnefont, G. Sarrabayrouse, Yves Jourlin, J.P. Jay
Sensors and Actuators A Physical

References

YearCitations

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