Superlattices of PbZrO3 and PbTiO3 prepared by multi-ion-beam sputtering

Abstract

Artificial superlattices consisting of antiferroelectric PbZrO3 (PZO) and ferroelectric PbTiO3 (PTO) have been fabricated by a multi-ion-beam sputtering technique. The epitaxial PZO and PTO layers were sequentially grown on (100)Pt/MgO substrates at a low substrate temperature of 415 °C with a periodicity from 5 to 100 perovskite unit cells. X-ray diffraction studies revealed the superlattice structures with a-axis oriented PTO layers on a-axis oriented PZO layers. The dielectric and ferroelectric properties of the superlattice films were enhanced with increasing periodicity.