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Evaluation of compositional depth profiles in mixed-phase (amorphous+crystalline) silicon films from real time spectroscopic ellipsometry

Materials ScienceMaterials EngineeringCompositional Depth ProfilesEngineeringOptical PropertiesSurface ScienceApplied PhysicsSilicon FilmsSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorThin Film Processing