Structural and electrical properties of epitaxial Si layers prepared by E-beam evaporation - Concepedia

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Structural and electrical properties of epitaxial Si layers prepared by E-beam evaporation

28

Citations

5

References

2008

Year

P. Dogan, E. Rudigier, F. Fenske, K.Y. Lee, B. Górka, B. Rau, E. Conrad, S. Gall

Thin Solid Films

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringEpitaxial Si LayersE-beam EvaporationApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorEpitaxial GrowthElectrical Properties

References

	Year	Citations

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