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Gallium-doped zinc oxide targets fabricated by sintering: Impact of target quality on sputtered thin film properties

Materials EngineeringMaterials ScienceSinteringEngineeringNanotechnologyOxide ElectronicsApplied PhysicsThin Film PropertiesGallium OxideTarget QualityThin Film Process TechnologyThin FilmsGallium-doped ZincThin Film Processing