Publication | Open Access

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Materials ScienceElectrical EngineeringEngineeringNanoengineeringMicrofabricationNanotechnologyMechanical EngineeringNano Electro Mechanical SystemMicroelectromechanical SystemsNanomechanicsMicro-electromechanical SystemNanoscale Building Blocks