Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen - Concepedia

Concepedia

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Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

65

Citations

28

References

2007

Year

Jarmila Müllerová, Pavol Šutta, Gijs van Elzakker, Miro Zeman, Milan Mikula

Applied Surface Science

Materials ScienceEngineeringMicrofabricationApplied PhysicsThin FilmsSilicon On InsulatorThin Film Processing

References

	Year	Citations

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