Fabrication of single-crystal diamond microcomponents

Abstract

We have combined a technique for the lift-off of thin diamond films from a bulk diamond with a technique for engraving diamond with a focused excimer laser to produce free-standing single-crystal diamond microstructures. One microcomponent that has been produced is a 12 tooth gear ∼400 μm in diameter and ∼13 μm thick. Other microstructures have also been demonstrated, showing the versatility of this method. This process should be applicable to producing diamond microcomponents down to spatial dimensions (width and thickness) of a few micrometers.