Publication | Closed Access
Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms
13
Citations
0
References
1999
Year
Micromotion Convert MechanismsEngineeringSoft RoboticsMechanical ControlMicrofabricationMicromachinesBiomimetic ActuatorChemical ActuatorActuationBiomedical EngineeringMicroactuatorElectrostatic Comb-drive Actuators
No additional data available for this publication yet. Check back later!