Publication | Closed Access
Monitoring of gas-phase species in metalorganic vapor phase epitaxy by fiber-optics based Fourier transform infrared spectroscopy
14
Citations
6
References
1994
Year
Materials ScienceFourier TransformEngineeringOptical PropertiesSpectroscopyGas-phase SpeciesApplied PhysicsNatural SciencesInfrared SpectroscopyFiber OpticsChemistryOptical SpectroscopySpectroscopic PropertySpectroscopic Method
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