Publication | Closed Access
Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining
38
Citations
15
References
2009
Year
Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationMechanical EngineeringFabrication TechniqueMicroelectronics3D PrintingMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1