Large-Scale Assembly of Silicon Nanowire Network-Based Devices Using Conventional Microfabrication Facilities

Abstract

We present a method for assembling silicon nanowires (Si-NWs) in virtually general shape patterns using only conventional microfabrication facilities. In this method, silicon nanowires were functionalized with amine groups and dispersed in deionized water. The functionalized Si-NWs exhibited positive surface charges in the suspensions, and they were selectively adsorbed and aligned onto negatively charged surface regions on solid substrates. As a proof of concepts, we demonstrated transistors based on individual Si-NWs and long networks of Si-NWs.