A rutherford scattering study of the diffusion of heavy metal impurities in silicon to ion-damaged surface layers - Concepedia

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A rutherford scattering study of the diffusion of heavy metal impurities in silicon to ion-damaged surface layers

48

Citations

25

References

1973

Year

T.M. Buck, J. M. Poate, K.A. Pickar, C. M. Hsieh

Surface Science

Materials ScienceIon-damaged Surface LayersIon ImplantationEngineeringPhysicsSurface ScienceApplied PhysicsIntrinsic ImpurityHeavy Metal ImpuritiesSemiconductor Device FabricationSilicon On InsulatorSilicon Debugging

References

	Year	Citations

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