Concepedia

A rutherford scattering study of the diffusion of heavy metal impurities in silicon to ion-damaged surface layers

T.M. Buck, J. M. Poate, K.A. Pickar, C. M. Hsieh

Surface Science · 1973 · 48 citations · 25 references

DOI

Concepts

References

25

Diffusion and Solubility of Copper in Extrinsic and Intrinsic Germanium, Silicon, and Gallium Arsenide

R. N. Hall, Joshua Racette · Journal of Applied Physics · 1964 · 617 citations

, , +15

The projection topograph: a new method in X-ray diffraction microradiography

A. R. Lang · Acta Crystallographica · 1959 · 503 citations

, , +4

Diffusion Mechanisms and Point Defects in Silicon and Germanium

A. Seeger, K. P. Chik · physica status solidi (b) · 1968 · 471 citations

, , +14

Defect studies in crystals by means of channeling

E. Bøgh · Canadian Journal of Physics · 1968 · 364 citations

, , +16

ION IMPLANTATION OF SILICON: I. ATOM LOCATION AND LATTICE DISORDER BY MEANS OF 1.0-MeV HELIUM ION SCATTERING

John Davies, J. Denhartog, L. Eriksson et al. · Canadian Journal of Physics · 1967 · 274 citations

, , +17