Highly effective p-type doping of diamond by MeV-ion implantation of boron - Concepedia

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Highly effective p-type doping of diamond by MeV-ion implantation of boron

53

Citations

9

References

2004

Year

Thomas A. Vogel, Jan Meijer, A.M. Zaitsev

Diamond and Related Materials

Materials ScienceMaterials EngineeringElectrical EngineeringDiamond-like CarbonEngineeringMev-ion ImplantationHexagonal Boron NitrideIon ImplantationBoron NitrideApplied PhysicsEffective P-type DopingMicroelectronics

References

	Year	Citations

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