Publication | Closed Access
STEM (scanning transmission electron microscopy) analysis of femtosecond laser pulse induced damage to bulk silicon
44
Citations
11
References
2004
Year
Materials SciencePhotonicsAdvanced Laser ProcessingEngineeringPhysicsFemtosecond Laser PulseOptical PropertiesLaser-induced BreakdownApplied PhysicsLaser AblationLaser Processing TechnologyUltrafast LasersLaser Damage
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