Ultrasonic vibration-assisted femtosecond laser machining of microholes

Abstract

In this note, we describe a novel approach to improving laser hole drilling quality by exciting the work material with a high frequency ultrasonic vibrator during a femtosecond laser drilling process. It is found that both the aspect ratio (depth over diameter) and the wall surface finish of the microholes fabricated using the ultrasonic vibration (US) assisted laser drilling are improved, compared to those laser machined without US assistance. This is because the introduction of US into the femtosecond laser drilling process reduced the resolidified and redeposited particles on the wall surfaces.