Japanese Journal of Applied Physics · 1991 · 16 citations · 4 references
Natural SciencesChemistryElectrochemistryElectronic MaterialsPlasma PhysicsIon-selective ElectrodesWorking ElectrodesChamber Wall EffectsCharge State DeterminationCharge-state FormationCharging EffectsElectron Cyclotron Resonance Plasma SourcesHigh-intensity Beam PhysicsIon Source PhysicsIon Sources
The beam intensity of argon ions was measured when an electrode was used in the first stage of a RIKEN Electron Cyclotron Resonance Ion Source (ECRIS). The enhancement of higher charge state performance was observed when we used the electrode. The beam intensity is strongly dependent on the bias voltage of the electrode. We also observed that larger current of higher-charge-state ions can be obtained when we used the electrode after coating the chamber wall with Al 2 O 3 .
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