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Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions

Resonant Loading ConditionsEngineeringMechanical BehaviorMechanical EngineeringStressstrain AnalysisPolycrystalline SiliconCrack GrowthSolid MechanicsMicrostructure-strength RelationshipMechanics Of MaterialsMicro-electromechanical SystemLow-cycle FatigueFatigueMicrostructure