Field emitted electron energy distribution from nitrogen-containing diamondlike carbon

Abstract

We report on energy resolved field emission measurements of 0.3 μm thick nitrogen containing diamondlike carbon (DLC). The film used in this study was deposited by filtered arc deposition onto a highly p-doped Si(100) wafer. The film showed homogeneous field emission over the entire wafer area with an onset field for 1 nA emission current of 20–25 V/μm. The energy resolved field emission measurements were carried out with an applied electric field of 20–22 V/μm. The field emitted electrons originate from the Fermi energy, indicating that no field penetration occurs. The energy distribution has a FWHM of 0.63 eV at an applied field of 21 V/μm. The spectra could be deconvoluted using standard tunneling theory. The results of the deconvolution indicate an electric field strength of 6500 V/μm at the emission site.