Concepedia

Publication | Closed Access

Synthesis of silicon nitride films by ion-beam-enhanced deposition and their protective properties against oxidation

DOI

15

Citations

4

References

1989

Year

Shigeji Taniguchi, Toshio Shibata, Kyotaro Nakamura, Xianghuai Liu, Zhihong Zheng, Hwang Wei, Zou Shihchang
Materials Science and Engineering A

References

YearCitations

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