Concepedia

Stress engineering and mechanical properties of SU-8-layers for mechanical applications

Jens Hammacher, A. Fuelle, J. Flaemig, J. Saupe, Bernd Loechel, Juergen Grimm

Microsystem Technologies · 2008 · 61 citations · 4 references

DOI

Concepts

References

4

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

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Soft, entirely photoplastic probes for scanning force microscopy

G. Genolet, Juergen Brügger, M. Despont et al. · Review of Scientific Instruments · 1999 · 114 citations · Full text

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Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

Jaekul Lee, Hyunjung Shin, Sungdong Kim et al. · Japanese Journal of Applied Physics · 2003 · 16 citations

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New photoplastic fabrication techniques and devices based on high aspect ratio photoresist

G. Genolet · Infoscience (Ecole Polytechnique Fédérale de Lausanne) · 2001 · 15 citations · Full text

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