Simulation of growth dynamics in atomic layer deposition. Part II. Polycrystalline films from cubic crystallites - Concepedia

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Simulation of growth dynamics in atomic layer deposition. Part II. Polycrystalline films from cubic crystallites

38

Citations

41

References

2006

Year

Ola Nilsen, O. B. Karlsen, Arne Kjekshus, Helmer Fjellvåg

Thin Solid Films

Materials ScienceEngineeringCrystal Growth TechnologySurface ScienceApplied PhysicsCubic CrystallitesThin FilmsChemical DepositionThin Film ProcessingChemical Vapor DepositionAtomic Layer DepositionMicrostructurePart Ii

References

	Year	Citations

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