A comparison of TiN films produced by reactive d.c. sputtering and ion-assisted deposition - Concepedia

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A comparison of TiN films produced by reactive d.c. sputtering and ion-assisted deposition

22

Citations

13

References

1991

Year

A.V. Bieli, H. Kheyrandish, J.S. Colligon

Thin Solid Films

Materials EngineeringMaterials ScienceTin FilmsEngineeringCorrosionReactive D.c. SputteringIon-assisted DepositionSurface ScienceApplied PhysicsThin FilmsChemical DepositionSurface ProcessingChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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