Characteristics of Cu plasma produced by a laser interaction with a solid target

TLDR

A pulsed Nd:YAG laser (52 mJ, 335 nm, 7 ns) generated high‑density Cu plasma in vacuum and argon, whose lifetime, electron temperature, velocity, and density were measured by spectroscopy, a CCD camera, and a Langmuir probe positioned 3.5 mm from the target. Probe‑measured electron temperatures agreed with spectroscopic profiles, while plasma lifetime and CCD images varied with argon pressure, indicating that optimized plasma parameters enhance laser‑plasma deposition of thin films.

Abstract

Characteristics of laser produced Cu plasma were investigated using spectroscopy, a CCD camera, and a Langmuir single probe. A pulsed Nd : YAG laser of 52 mJ, 335 nm, and pulse duration 7 ns was used for generating high density plasma in vacuum and argon buffer gas. Spectroscopic measurements were devoted to determine plasma lifetime, electron temperature Te, plasma velocity Vp, and electron density Ne. Te was determined using a Boltzmann plot and Ne was determined using Stark line broadening. Langmuir single probe was located at 3.5 mm from Cu target to measure Te and Ne. The Te values of the probe were coincident with the spatial profile of determined by spectroscopic measurements. Plasma lifetime and the CCD camera image were dependent on the Ar pressure. These plasma parameters improve the laser plasma deposition thin films.