Publication | Closed Access

Monte Carlo simulations of gas flow and heat transfer in vacuum packaged MEMS devices

Electrical EngineeringMems DevicesEngineeringHeat Transfer ProcessMicrofabricationHeat ExchangerApplied PhysicsNumerical SimulationThermal ModelingThermodynamicsElectronic PackagingHeat TransferMicroelectronicsThermal EngineeringGas FlowMicro-electromechanical SystemMonte Carlo Simulations