Characterization of diffused ECR plasma—Application to pulsed plasma ion implantation of nitrogen in titanium - Concepedia

Concepedia

Publication | Closed Access

Characterization of diffused ECR plasma—Application to pulsed plasma ion implantation of nitrogen in titanium

20

Citations

2

References

1998

Year

A. Sarkissian, A. Bourque-Viens, R.W. Paynter, R.G. Saint-Jacques, B.L. Stansfield

Surface and Coatings Technology

Materials SciencePlasma Ion ImplantationIon ImplantationDiffused Ecr Plasma—applicationPlasma ApplicationPlasma Processing

References

	Year	Citations

Page 1