Applied Physics Letters · 1978 · 21 citations · 6 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsMicrowave EngineeringThin FilmsGlass MaterialsMicrowave ResonatorsOptical ResonatorsOxide SemiconductorsBorosilicate GlassesPhotolithographic PatterningSemiconductor Oxide Thin FilmsSputteringZinc Oxides
SAW resonators have been fabricated from reflection strip arrays of ZnO films on borosilicate glass substrates by rf sputtering and standard photolithographic processing. Unloaded Q values were nearly 1000 and a linear temperature coefficient of about −10 ppm/°C was obtained when operated at a frequency of 100 MHz. Achievable Q values for ZnO/glass SAW resonators at this frequency are discussed.
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310-MHz SAW resonator with <i>Q</i> at the material limit
R. C. M. Li · Applied Physics Letters · 1977 · 23 citations