Absolute Cross Sections for the Electron‐Impact Dissociation of CF₄ and CHF₃ into the CF_x (x = 1−3) Neutral Radicals

Abstract

Abstract The electron‐impact energy dependence of the dissociation cross sections of CF 4 and CHF 3 into the CF x (x = 1 − 3) free radicals was previously reported, in which the absolute values of the cross sections were tentatively estimated based on certain assumptions for the unknown ionization cross sections of the CF 2 and CF radicals. These assumptions are no longer needed, since a complete set of absolute parent and dissociative ionization cross sections of CF x radicals has been reported recently by Becker and co‐workers. Based on these data, the absolute cross sections for the electron‐impact neutral dissociation of CF 4 and CHF 3 into CF 3 , CF 2 and CF from the threshold up to 200–300 eV have now been accurately calibrated. Adjustments to the previously reported absolute cross sections of up to a factor of 16 were necessary.