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Thick vacuum deposited silicon films suitable for the anode of Li-ion battery

Materials ScienceEngineeringLi-ion Battery MaterialsMetal AnodeLithium-ion BatteryApplied PhysicsLithium-ion BatteriesSilicon FilmsCathode MaterialsEnergy StorageThick VacuumLi-ion BatteryBatteriesVacuum DeviceThin FilmsAnode MaterialsSolid-state Battery