SID Symposium Digest of Technical Papers · 2001 · 14 citations · 2 references
Natural SciencesMaterials ScienceMetrologyOpticsOptoelectronicsInterferometryOptical MetrologyRefractive IndexAccuracyInterferometric MeasurementMeasurement AccuracyOptical InterferometryOptical ReflectionPhase Compensation
Abstract We developed two fast, simple, and accurate optical methods for reflective LCD cell‐gap measurements. One method uses optical reflection, while the other uses optical phase compensation. They have higher accuracy, simpler setup and procedure, and lower cost than the present optical interference method. The typical measurement accuracy is about 0.05, 0.1, and 0.3um respectively, for phase compensation, optical reflection, and optical interference methods.
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