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Preparation of fine silicon particles from amorphous silicon monoxide by the disproportionation reaction

Materials ScienceMaterials EngineeringEngineeringMicrofabricationAmorphous Silicon MonoxideSiliceneSemiconductor Device FabricationFine Silicon ParticlesChemistryAmorphous SolidSilicon On InsulatorDisproportionation ReactionPowder Synthesis