Resonating modes of vibrating microcantilevers in liquid

Abstract

A study of nanomechanical cantilevers vibrating at various resonating modes in liquid is presented. Resonant frequency spectrum with 16 well resolved flexural modes is obtained. The quality factor increased from 1 at mode 1 to 30 at mode 16. The theoretical estimate of eigenfrequency using the Elmer–Dreier model [F.-J. Elmer and M. Dreier, J. Appl. Phys. 81, 12 (1997)] and Sader’s extended viscous model [C. A. Van Eysden and J. E. Sader, J. Appl. Phys. 101, 044908 (2007)] matched well with the experimental data. The apparent mass of the liquid comoved by the oscillating cantilevers decreased asymptotically with mode number.