Concepedia

Publication | Closed Access

Deposition and characterization of amorphous aluminum nitride thin films for a gate insulator

DOI

21

Citations

20

References

2014

Year

Haruyoshi Oikawa, Ryota Akiyama, K. Kanazawa, Shinji Kuroda, Isao Harayama, Kayo Nagashima, Daiichiro Sekiba, Yoshito Ashizawa, A. Tsukamoto, Katsuji Nakagawa,
Thin Solid Films

References

YearCitations

Page 1