Publication | Closed Access

On the partial differential equations of electrostatic MEMS devices III: Refined touchdown behavior

Device ModelingElectrical EngineeringElectrohydrodynamicsEngineeringMicrofabricationApplied PhysicsPartial Differential EquationsNano Electro Mechanical SystemMicroelectromechanical SystemsMicroelectronicsMicro-electromechanical SystemElectromagnetic Compatibility