Concepedia

Near-surface defects in hydrogen-plasma-treated boron-doped silicon studied by positron beam spectroscopy

C. E. González, S. C. Sharma, N. Hozhabri, S. Ashok

Applied Physics A · 1999 · 11 citations · 0 references

Concepts

Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsSemiconductor MaterialsSolid State PhysicsDefectsPlasma-surface InteractionsSemiconductor DefectsSemiconductor PhysicsSemiconductor SurfacesSurface PhysicsDefect PhysicsNear-surface CharacterizationSilicon DefectsSilicon DopingSurface Defect SpectroscopySurface DefectsSurface Defects Characterization