Damage studies in dry etched textured silicon surfaces - Concepedia

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Damage studies in dry etched textured silicon surfaces

77

Citations

7

References

2003

Year

G. Kumaravelu, Maan M. Alkaisi, A. Bittar, Daniel Macdonald, Jianhua Zhao

Current Applied Physics

Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsElectronic PackagingSilicon On InsulatorMicroelectronicsDamage StudiesSilicon Debugging

References

	Year	Citations

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