The mechanical behavior of silicon during small-scale indentation - Concepedia

Concepedia

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The mechanical behavior of silicon during small-scale indentation

127

Citations

22

References

1990

Year

George M. Pharr, W. C. Oliver, David R. Clarke

Journal of Electronic Materials

EngineeringMicromechanicsMechanical EngineeringSolid MechanicsSmall-scale IndentationSilicon On InsulatorMechanics Of MaterialsMicrostructure

References

	Year	Citations

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