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Effect of sputtering gas pressure and nitrogen concentration on crystal orientation and residual stress in sputtered AlN films

Materials ScienceMaterials EngineeringNitrogen ConcentrationAluminium NitrideEngineeringSurface ScienceApplied PhysicsCrystal OrientationResidual StressThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure