Publication | Closed Access
Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection
55
Citations
7
References
2004
Year
EngineeringMicromachinesMicroscopyMicrofabricationMechanical EngineeringDiffractive Optical EncodersBiomedical EngineeringInstrumentationMicro-optical ComponentMicrofluidicsSilicon Force SensorOptical SensorsMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1