Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

Jun Wang, Yu-chen Karen Chen, Qingxi Yuan, Andrei Tkachuk, Can K. Erdonmez, Benjamin Hornberger, Michael Feser

Applied Physics Letters · 2012 · 115 citations · 19 references

Concepts

Abstract

A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields.

References

19