Hard-x-ray microscopy with Fresnel zone plates reaches 40nm Rayleigh resolution

Abstract

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8–10keV photons demonstrated a first-order lateral resolution below 40nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30nm range; good-quality images can be obtained at video rate, down to 50ms∕frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed.