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Gradient etching of silicon-based thin films for depth-resolved measurements: The example of Raman crystallinity

Materials ScienceEngineeringRaman CrystallinityOptical PropertiesSilicon On InsulatorSurface ScienceApplied PhysicsPlasma EtchingThin FilmsSilicon-based Thin FilmsMicroelectronicsGradient EtchingNanolithography MethodThin Film Processing