Gradient etching of silicon-based thin films for depth-resolved measurements: The example of Raman crystallinity

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Engineering, Water Molecules, Silicon On Insulator +20

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 792 citations

Materials Science, Wafer Scale Processing, Orientation Silicon +12

Intrinsic microcrystalline silicon: A new material for photovoltaics

O. Vetterl, F. Finger, R. Carius et al. · Solar Energy Materials and Solar Cells · 2000 · 574 citations

Materials Science, Engineering, Solar Power +6

Texture etched ZnO:Al coated glass substrates for silicon based thin film solar cells

O. Kluth, B. Rech, Lothar Houben et al. · Thin Solid Films · 1999 · 526 citations

Materials Science, Engineering, Oxide Electronics +8

Determining the material structure of microcrystalline silicon from Raman spectra

C. Smit, R.A.C.M.M. van Swaaij, H. Donker et al. · Journal of Applied Physics · 2003 · 382 citations · Full text

Engineering, Crystal Growth Technology, Surface-enhanced Raman Scattering +20