Journal of Applied Physics · 1996 · 47 citations · 28 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryPolymer ChemistryPolymer MaterialsLaser Material ProcessingPolymer CharacterizationPolymer Physical ChemistryPolymer PhysicsPolymer StructurePolymer Thin FilmsConductivityConductivity In PolymersConjugated Polymer StructuresLaser AblationLaser Surface AblationLaser Surface TreatmentOptical Polymer ProcessingX-ray Diffraction Analysis
Extensive control of structures of deposited polymer films has been realized when the films have been prepared on a quartz or KBr substrate by laser ablation of polyacrylonitrile (PAN) with 308 (XeCl), 248 (KrF), and 193 nm (ArF) excimer laser beams, as revealed by scanning electron microscopy, infrared spectroscopy, x-ray photoelectron spectroscopy, electron spin resonance, and x-ray diffraction measurements. The original structure of PAN is essentially retained for the films deposited by ablation at 308 nm. Deformation and elimination of nitrile groups occur for the films prepared by ablation at 248 and 193 nm, respectively. Furthermore, a remarkable power-dependent structural change has been observed at 248 nm; an increase in the laser power has led to ring closure of nitrile groups, resulting in the development of π-conjugated systems. In addition, a rather high electric conductivity on the order of 10−2S cm−1 has been given to the films deposited by ablation at 248 and 193 nm on reirradiation with lower-power excimer laser beams of 308 nm.
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Excimer laser etching of polyimide
James H. Brannon, J. R. Lankard, A. I. Baise et al. · Journal of Applied Physics · 1985 · 386 citations
Natural Sciences, Materials Engineering, Materials Science +17
Direct etching of polymeric materials using a XeCl laser
James E. Andrew, P. E. Dyer, Daniel J. Förster et al. · Applied Physics Letters · 1983 · 382 citations
Natural Sciences, Materials Engineering, Materials Science +14