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Effects of ferroelectric fatigue on the piezoelectric properties (d33) of tetragonal lead zirconate titanate thin films

Peter Arne Gerber, C. Kügeler, U. Ellerkmann, P. Schorn, U. Böttger, Rainer Waser

Applied Physics Letters · 2005 · 15 citations · 6 references

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Abstract

The fatigue of the electromechanical properties of tetragonal PbZrx, Ti1−xO3 thin films is investigated. The decrease of electromechanical small-signal response is compared to the fatigue of the electric properties and examined in detail. Property fatigue is attributed mainly to switching-failure of the unit cells.

References

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Piezoelectric properties of rhombohedral Pb(Zr, Ti)O3 thin films with (100), (111), and “random” crystallographic orientation

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Reversible and irreversible polarization processes in ferroelectric ceramics and thin films

D. Bolten, U. Böttger, Rainer Waser · Journal of Applied Physics · 2003 · 75 citations · Full text

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Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer

Peter Arne Gerber, Andreas Roelofs, O. Lohse et al. · Review of Scientific Instruments · 2003 · 51 citations · Full text

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Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films

Peter Arne Gerber, Andreas Roelofs, C. Kügeler et al. · Journal of Applied Physics · 2004 · 35 citations

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