A Route to Three‐Dimensional Structures in a Microfluidic Device: Stop‐Flow Interference Lithography

Abstract

Go with the flow: The combination of phase-mask interference lithography and microfluidic flow lithography yields stop-flow interference lithography, a new route for the fabrication of large numbers of three-dimensionally patterned polymeric particles with sub-micrometer features. For example, two-sided Janus particles can be formed when streams of different photopolymerizable liquids are combined (see picture).