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Formation of vacancy clustered defects from cascade collisions during heavy-ion irradiation and their annihilation by freely-migrating interstitial atoms

Ion ImplantationHeavy Ion PhysicEngineeringHeavy-ion IrradiationPhysicsFreely-migrating Interstitial AtomsApplied PhysicsCondensed Matter PhysicsDefect FormationIon EmissionCascade Collisions