Conductive transparent films deposited by simultaneous sputtering of zinc-oxide and indium-oxide targets - Concepedia

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Conductive transparent films deposited by simultaneous sputtering of zinc-oxide and indium-oxide targets

30

Citations

4

References

2000

Year

Kikuo Tominaga, Taichi Murayama, Ikue Mori, Takashi Okamoto, Kazunori Hiruta, Toshihiro Moriga, Ichiro Nakabayashi

Materials ScienceIndium-oxide TargetsEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSemiconductor MaterialSimultaneous SputteringThin FilmsChemical DepositionThin Film ProcessingConductive Transparent Films

References

	Year	Citations

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