Influence of a superficial field of residual stress on the propagation of surface waves—Applied to the estimation of the depth of the superficial stressed zone

Abstract

In this study, we were interested in the dispersion of surface waves caused by the presence of a micrometric field of residual stress on the surface of an amorphous medium. We have shown that in relation to surface waves, a stressed structure like this is comparable to a layer on substrate type structure. The design and implementation of SAW-IDT MEMS sensors enabled quasi-monochromatic Rayleigh-type surface waves to be generated and the dispersion phenomenon to be studied over a wide range of frequencies for different superficial fields of residual stress. The thicknesses of the stressed cortical zones were estimated with good accuracy using an inverse method.